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Imaging and analytical capabilities

The electron beam can be scanned across relatively large regions to collect scanning electron microscopy images (e.g. backscattered electron images), quantitative compositional maps (from X-ray wavelength dispersive spectroscopy) and cathodoluminescence images (visible light emitted during electron-beam irradiation). Collectively, the images can be used to reveal the spatial distribution of elements in a specimen. The images are commonly used to guide subsequent quantitative analyses. The real power of the EMP is that it has unmatched spatial resolution and quantitative capabilities. The electron beam can be focused onto sub-micron sized spots to conduct in-situ quantitative analyses of most elements in the periodic table down to concentrations as low as ~10 parts per million.